Kariper, I. A.Tezel, F. Meydaneri2024-09-292024-09-2920210250-47070973-7669https://doi.org/10.1007/s12034-021-02573-5https://hdl.handle.net/20.500.14619/4149This study involves the preparation of ruthenium oxide (RuO2) thick films by a different method than those reported in the literature and the investigation of their dielectric properties. The substrates were coated with RuO2 thick films deposited using a mixture of invertase enzyme and ruthenium ions dissolved in water. Scanning electron microscopy-energy dispersive X-ray spectroscopy was employed for surface analysis of the films. Current/potential measurements were used to examine dielectric properties and X-ray diffraction to examine structural properties. The capacitance per unit mass of RuO2 thick films produced with invertase enzyme in amorphous structure was found to be 845 F g(-1). Regarding energy dispersive X-ray spectroscopy analysis, thick films were found to contain around 79.15% ruthenium, evenly distributed on the surface of the films. In addition, we performed capacitance measurements for different temperatures and got very interesting results.eninfo:eu-repo/semantics/closedAccessRuthenium oxide thick filmsupercapacitorbio-chemical bath depositionlow-temperature effectenzymesArticle10.1007/s12034-021-02573-52-s2.0-851194285304Q344WOS:000720638100001Q4