SYNTHESIS OF MgO THIN FILMS USED IN GAS SENSORS: EFFECT OF HEAT TREATMENT ON STRUCTURAL AND ELECTRO-OPTICAL PROPERTIES
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2020-12-04
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info:eu-repo/semantics/openAccess
Özet
Bu tez çalışmasında, MgO ince filmleri Kimyasal Banyo Depolama (CBD) metodu ile üretilmiş ve 300 °C, 350 ?C, 400 ?C ve 450 ?C’lerde tavlanmıştır. Üretilen filmlerin yapısal özellikleri X-ışını kırınım (XRD) yöntemi ile elde edilmiştir. Kimyasal bileşimleri EDX (Energy Dispersive X-ray) analizi ile belirlenmiştir. Yüzey morfolojileri ve yüzey kabalıkları ise FESEM ve AFM ile analiz edilmiştir. Yüzey kabalığının artması iletimde direnç etkisi yapacağından yük depolama kapasitesini azaltmıştır. Akım-voltaj (I-V) ölçümleri Keithley 2400 sourcemeter yardımı ile alınmıştır ve özdirenç değerleri elde edilmiştir. UV-vis spektrofotometre ile de geçirgenlik (T), yansıma (R), kırılma indisi (n) ve sönümleme katsayısı (k) gibi optik özellikleri belirlenmiştir.
In this thesis, MgO thin films were produced by the Chemical Bath Deposition (CBD) method and annealed at 300 °C, 350 °C, 400 °C and 450 °C. The structural properties of the films produced were obtained by X-ray diffraction (XRD) method. Their chemical composition was determined by EDX (Energy Dispersive X-ray) analysis. Surface morphologies and surface roughness were analyzed by FESEM and AFM. Since the increase in surface roughness will have a resistance effect on transmission, it has decreased the load storage capacity. Current-voltage (I-V) measurements were taken with the help of Keithley 2400 sourcemeter and resistivity values were obtained. Optical properties were determined with the Uv-vis spectrophotometer."
In this thesis, MgO thin films were produced by the Chemical Bath Deposition (CBD) method and annealed at 300 °C, 350 °C, 400 °C and 450 °C. The structural properties of the films produced were obtained by X-ray diffraction (XRD) method. Their chemical composition was determined by EDX (Energy Dispersive X-ray) analysis. Surface morphologies and surface roughness were analyzed by FESEM and AFM. Since the increase in surface roughness will have a resistance effect on transmission, it has decreased the load storage capacity. Current-voltage (I-V) measurements were taken with the help of Keithley 2400 sourcemeter and resistivity values were obtained. Optical properties were determined with the Uv-vis spectrophotometer."
Açıklama
Anahtar Kelimeler
MgO, Gaz Sensörü, Tavlama, MgO, Gas Sensors, Annealing
